JPH0550129B2 - - Google Patents

Info

Publication number
JPH0550129B2
JPH0550129B2 JP59022964A JP2296484A JPH0550129B2 JP H0550129 B2 JPH0550129 B2 JP H0550129B2 JP 59022964 A JP59022964 A JP 59022964A JP 2296484 A JP2296484 A JP 2296484A JP H0550129 B2 JPH0550129 B2 JP H0550129B2
Authority
JP
Japan
Prior art keywords
layer
forming
window
polycrystalline silicon
emitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59022964A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60169169A (ja
Inventor
Kyoshi Watabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59022964A priority Critical patent/JPS60169169A/ja
Publication of JPS60169169A publication Critical patent/JPS60169169A/ja
Publication of JPH0550129B2 publication Critical patent/JPH0550129B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/30—Devices controlled by electric currents or voltages
    • H10D48/32—Devices controlled by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H10D48/34—Bipolar devices
    • H10D48/345—Bipolar transistors having ohmic electrodes on emitter-like, base-like, and collector-like regions

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP59022964A 1984-02-13 1984-02-13 半導体装置の製造方法 Granted JPS60169169A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59022964A JPS60169169A (ja) 1984-02-13 1984-02-13 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59022964A JPS60169169A (ja) 1984-02-13 1984-02-13 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS60169169A JPS60169169A (ja) 1985-09-02
JPH0550129B2 true JPH0550129B2 (en]) 1993-07-28

Family

ID=12097265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59022964A Granted JPS60169169A (ja) 1984-02-13 1984-02-13 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS60169169A (en])

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2741757B2 (ja) * 1986-04-30 1998-04-22 株式会社日立製作所 半導体装置及びその製造方法
JPS6393151A (ja) * 1986-10-07 1988-04-23 Toshiba Corp 半導体装置
JP2661153B2 (ja) * 1988-06-30 1997-10-08 日本電気株式会社 半導体装置の製造方法
JP2690468B2 (ja) * 1995-03-24 1997-12-10 株式会社日立製作所 半導体装置
JP5588671B2 (ja) 2008-12-25 2014-09-10 ローム株式会社 半導体装置の製造方法
US8188484B2 (en) 2008-12-25 2012-05-29 Rohm Co., Ltd. Semiconductor device
JP2011134910A (ja) 2009-12-24 2011-07-07 Rohm Co Ltd ＳｉＣ電界効果トランジスタ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57176762A (en) * 1981-04-22 1982-10-30 Nec Corp Semiconductor device
JPS5856459A (ja) * 1981-09-30 1983-04-04 Fujitsu Ltd 半導体装置の製造方法
US4491860A (en) * 1982-04-23 1985-01-01 Signetics Corporation TiW2 N Fusible links in semiconductor integrated circuits

Also Published As

Publication number Publication date
JPS60169169A (ja) 1985-09-02

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